高増潔が関係した国際会議での発表論文です.(2020年4月)
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- M. Yokei, M. Hayashi, M. Michihata, K. Takamasu, S. Takahashi: Experimental investigation on laser additive processing principle for nanostructures based on optical trapping potential, Proc. of ASPEN2019, Matsue, Japan, 2019, A05
- S. Masui, M. Michihata, K. Takamasu, S. Takahashi: Fabrication of dual-periodic nanostructures with multi-exposure interference lithography using Lloyd’s mirror, Proc. of ASPEN2019, Matsue, Japan, 2019, A14
- T. Kume, H. Yasuda, T. Mibe, M. Michihata, K. Takamasu: Pulse interval calibration of an optical frequency comb compressed by an etalon, Proc. of ASPEN2019, Matsue, Japan, 2019, C18
- S. Masuda, T. Takamura, S. Takahashi, H. Matsumoto, K. Takamasu: High precision measurement of etalon absolute length using optical comb pulsed interference, Proc. of ASPEN2019, Matsue, Japan, 2019, C19
- H. Nakajima, S. Masuda, A. Winarno, T. Takamura, H. Matsumoto, S. Takahashi, K. Takamasu: Evaluation of characteristics of ball lens and uniaxial stability in laser tracker, Proc. of ASPEN2019, Matsue, Japan, 2019, C31
- M. Chen, S. Xie, J. Li, Q. Liu, G. Zhou, C. Lin, H. Yu, J. Zhou, H. Wu, H. Matsumoto, S. Takahashi, K. Takamasu: Spectroscopic interferometer with a large length range by rotating diffraction grating, Proc. of ASPEN2019, Matsue, Japan, 2019, P68
- Tatsuya Kume, Hiromasa Yasuda, Tsutomu Mibe, Masaki Michihata, Kiyoshi Takamasu: Pulse Interval of an Optical Frequency Comb Compressed by an Etalon, Proc. of ISMTII2019, Niigata, Japan, 2019, A10
- Shiwei Ye, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Optical depth measurement of the diffraction-limited microgrooves with a noise-immune dual-wavelength interferometer, Proc. of ISMTII2019, Niigata, Japan, 2019, A21
- Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Coherent optical microscopy for micro-structured surface inspection beyond diffraction limit, Proc. of ISMTII2019, Niigata, Japan, 2019, A22
- Bohuai Chu, Zheng Zhao, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Sensing Near-Field Light Distribution for Microsphere Measurement Based on Whispering Gallery Mode, Proc. of ISMTII2019, Niigata, Japan, 2019, A24
- Masaki Michihata, Zhao Zheng, Kiyoshi Takamasu, Satoru Takahashi: In-Process Measurement Technique of Micro-Fiber Diameter with Interfered Scattering Pattern of Two Beam Irradiation, Proc. of ISMTII2019, Niigata, Japan, 2019, D02
- Masaki Michihata, Yumeki Kobayashi, Bohuai Chu, Kiyoshi Takamasu, Satoru Takahashi: System Development for Microsphere Measurement Based on Whispering Gallery Mode Resonance, Proc. of ISMQC2019, Belgrade, Serbia, 2019
- Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: A novel optical super-resolution microscopy for coherent imaging system for micro-structured surface inspection, Proc. of euspen2019, Bilbao, Spain, 2019, 268-269
- Shusei Masuda, Tomohiko Takamura, Winarno Agustinus, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Development of the trilateration optical comb tracking system adopting ball lenses as references and targets, Proc. of euspen2019, Bilbao, Spain, 2019, 278-279
- Shuzo Masui, Masaki, Michihata, Kiyoshi Takamasu, Satoru Takahashi: Fabrication of nano-and micro-structured surface using spatial beat of evanescent wave interference lithography, Proc. of euspen2019, Bilbao, Spain, 2019, 100-101
- Jungmin Kang, Takao Kitayama, Ryo Kizaki, Yui Toyoshi, Kota Hashimoto, Agustinus Winarno, Kiyoshi Takamasu, Kazuya Yamamura, Katsuyoshi Endo: Absolute distance measurement of optical path length of non-contact three-dimensional nanoprofiler based on normal vector tracing method by tandem white-light interferometer, Proc. of SPIE Vol. 11056, 2019, 110560D-1-6
- Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Stefan Decoster, Frederic Lazzarino, Gian Lorusso: Linewidth and Roughness Measurement of SAOP by Using FIB and Planer-TEM as Reference Metrology, SPIE Advanced Lithography 2019, San Jose, USA, 2019, 109590Q 1-8
- Ye Shiwei, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Quantitative depth evaluation method of diffraction limited microgrooves based on near-field optical response, the 4th SJTU Future Information Technology International Forum for Young Scholars (SIFYS), 2018
- Ye Shiwei, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Improvement of quantitative depth evaluation for diffraction-limited microgroove using LED light source, XXII World Congress of the International Measurement Confederation (IMEKO 2018), Belfast, UK, 2018, 142010 1-4
- D. Kong, M. Michihata, K. Takamasu, S. Takahashi: In-Process Measurement of Resin’s Curing Degree in Micro-Stereolithography Using Internal Reflection at Critical Angle, XXII World Congress of the International Measurement Confederation (IMEKO 2018), Belfast, UK, 2018, 142024 1-4
- Masahiro Hayashi, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Basic Study on Laser Additive Processing for Nanostructures Based on Optical Trapping Potential – Property Investigation of Generated Bessel Beam -, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, B-6-1
- Zheng Zhao, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Scattered Field Analysis for Diameter Measurement of Tapered Optical Fiber under Counter-propagating-beam Illumination, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-9
- Yumeki Kobayashi, Zheng Zhao, Bohuai Chu, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Analysing tapered fiber-microsphere coupling for diameter measurement of microsphere using whispering gallery mode resonance, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-10
- Ryoko Sakuma, Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Investigation of super-resolution microscopy by use of a nano-patterned substrate, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-11
- Jungmin Kang, Takao Kitayama, Ryo Kizaki, Yui Toyoshi, Agustinus Winarno, Kiyoshi Takamasu, Kazuya Yamamura, Katsuyoshi Endo: Absolute measurement of optical path length of the three-dimensional nanoprofiler based on the normal vector tracing method by tandem white light interferometer, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-12
- Agustinus Winarno, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: In-situ Measurement of the Refractive Index and Geometrical Length for Determining the Location of Optical Part Using a Tandem Low-Coherence Interferometry, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-16
- Shusei Masuda, Tomohiko Takamura, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: Development of a laser tracker using absolute length measurement technique by an optical comb pulsed interferometer, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-17
- Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu: Self-calibration method of nanometer profile measurement on large aspheric optical surface, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-1-18
- Hirokazu Matsumoto, Kiyoshi Takamasu: Non-Contact High Speed Measurements of the Processed-Product Shape Using New Optical Comb Interferometer, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-3-1
- Seiko Furuya, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Basic Study on Cell-in-Microfactory System with Localized Light Control – Analysis on handling performance of microparticles based on near-surface light wave -, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, D-3-2
- Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Toshihiko Shibanuma, Hironao Tanaka, Satoru Takahashi: Fabrication of Functional Subwavelength Structured Surface Using Evanescent Wave Interference Lithography, 17th International Conference on Precision Engineering (ICPE 2018), Kamakura, JAPAN, 2018, F-2-7
- Masaki Michihata, Yumeki Kobayashi, Zheng Zhao, Bouhai Chu, Kiyoshi Takamasu, Satoru Takahashi: Ultra high precision diameter measurement of a microsphere based on whispering gallery mode resonances, The 1st JSPE affiliate workshop -Metrology and measurement, 12 November 2018, Kamakura, Japan, 2018
- Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota: Line Width Roughness of Advanced Semiconductor Features by Using FIB and Planar-TEM as Reference Metrology, SPIE Advanced Lithography, San Jose, USA, 2018, 10585-13
- Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Highly Sensitive Back-Focal-Plane Interferometry for Tracking Nanoparticle Position, CLEO2017, San Jose, USA, 2017
- Masaki Michihata, Bohuai Chu, Zhao Zheng, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi: Accuracy Improvement in Diameter Measurement of Microsphere Based on Whispering Gallery Mode, 59th Ilmenau Scientific Colloquium, Ilmenau, Germany, 2017
- K. Hayashi, B. Chu, Z. Zhao, M. Michihata, K. Takamasu, S. Takahashi: Evaluation Strategy of Spheroidal Distortion for Micro-Sphere Based on Whispering Gallery Mode Resonance, 59th Ilmenau Scientific Colloquium, Ilmenau, Germany, 2017
- Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: Non-contact method of an absolute length measurement between two ball-lenses using a tandem low-coherence interferometer, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No. 109
- Shohei Hara, Winarno Agustinus, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: Coordinate measuring machine verification using an optical comb probe with ball-lens targets, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No. 150
- Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: In-process measurement on the thickness of photosensitive resin in evanescent wave-based nano-stereolithography, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No. 17
- Shiwei Ye, Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Experimental verification of a novel in-process depth measurements of diffraction limited micro-groove based on near-field optical response, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No. 46
- Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Numerical investigation on refractive index compensation performance of three-color method, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No. 51
- Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Development of nanoparticle detection method based on a new principle combining volatile liquid and optical observation method: Study of highly sensitive optical detection system, ISMTII 2017, 13th International Symposium on Measurement Technology and Intelligent Instruments, Xi’an, China, 2017, Paper No.243
- Shuzo Masui, Yuki Suzuki, Yuki Matsumoto, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Multi-beam interference lithography based on evanescent wave for functional nano-complex surface, ASPE2017, 32nd American society of precision engineering, Annual meeting, North Carolina, USA, 2017, 113-116
- Xiang Guo, Satoru Takahashi, Yohan Kondo, Youichi Bitou, Kiyoshi Takamasu: Nanometer Profile Measurement on Large Aspheric Optical Surface, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MET-O-05
- Agustinus Winarno, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: The Development of an Absolute Internal Distance Measurement Between Two Ball Lenses Within Sub-Micro Accuracy, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MET-O-06
- Shohei Hara, Winarno Agustinus, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: Accuracy Evaluation of Optical Comb Probe for Coordinate Measuring Machines Verification, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MET-O-07
- Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Monitor Resin’s Curing Degree for In-process Measurement in Micro-stereolithography, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MET-O-08
- Jumpei Miyachi, Kiyoshi Takamasu, Satoru Takahashi: Precision Profile Measurement for Small Aspheric Optical Surface by an Multi-beam Angle Sensor, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MET-O-15
- Shuzo Masui, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Theoretical Analysis of Multi-Beam Interference Lithography Combining Evanescent and Propagation Light, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MNF-O-09
- Yuki Matsumoto, Yuki Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Double Imaging Micro-Stereolithography for One-Shot Curing of Surface Micro-Structure Unit, ASPEN2017, 7th International Conference of Asian Society for Precision Engineering and Nanotechnology Program, Seoul, Korea, 2017, MNF-O-10
- Shiwei Ye, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Linnike microscopic interferometry for depth measurement of diffraction limited micro-groove structure on the semiconductor surface, ISOT2017, 18th International Symposium on Optomechatronic Technologies, Tainan, Taiwan, 2017, BK-02
- Bohuai Chu, Kohei Hayashi, Zheng Zhao, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: High-precision measurement of dielectric microsphere diameter using whispering gallery mode resonance, LEM21, The 9th International Conference on Leading Edge Manufacturing in 21st Century, Hiroshima, Japan, 2017, E29
- Kazuki Tachibana, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Characteristic analysis of phase contrast microscopy in liquid probe type surface inspection method, LEM21, The 9th International Conference on Leading Edge Manufacturing in 21st Century, Hiroshima, Japan, 2017, E39
- Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu, Takao Kitayama, Ryota Kudo, Katsuyoshi Endo: Non-Contact Remote Measurement of Internal Distance Between Two Plane Mirrors by Using a Tandem Low-Coherence Interferometer, ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications, Hong Kong, China, 2017
- Kiyoshi Takamasu: (Keynote) High-Accuracy Absolute Length Measurement Using Optical-Comb Pulsed Interferometer and Its Application for Verification of Coordinate Measuring Machines, ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications, Hong Kong, China, 2017, 1-4
- Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota: 3D-Profile Measurement of Advanced Semiconductor Features by Using FIB as Reference Metrology, SPIE Advanced Lithography, San Jose, USA, 2017, 10145-67
- Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Evanescent Light Exposing System under Nitrogen Purge for Nano-Stereolithography, 18th CIRP Conference on Electro Physical and Chemical Machining, Tokyo, Japan, Procedia CIRP 42, 2016, 77-80
- Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Precision absolute distance measurement technique onto rough surface object using self-beat signals of optical frequency comb, euspen2016, 16th International Conference & Exhibition, Nottingham, UK, 2016, P1.25
- Yuki Iwaki, Satoru Takahashi, Kiyoshi Takamasu: Development of 3D form measurement of semiconductor structure – Measurement of FinFET profile using TEM and CD-SEM images, euspen2016, 16th International Conference & Exhibition, Nottingham, UK, 2016, P1.52
- Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects, CLEO2016, Conference on Lasers and Electro-Optics, San Jose, USA, 2016, ATu3J.4
- Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Development of non-destructive optical depth measurement of sub-diffraction limit fine holes, nanoMan2016, 5th International Conference on Nanomanufacturing, Macau, China, 2016, 1-4
- Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: Proposal of in-process measurement for micro-stereolithography using surface plasmon resonance, LANE2016, 9th International Conference on Photonic Technologies, Physics Procedia 83, 2016, 964-970
- Shuzo Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Theoretical analysis of improved back-focal-plane interferometry for monitoring nanoparticle position, ASPE2016, 31st ASPE Annual Meeting, Portland, USA, 2016, 136-139
- Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Omnidirectional one-shot exposure micro-stereolithography for biomimetic hemisphere with micro structured surface, ASPE2016, 31st ASPE Annual Meeting, Portland, USA, 2016, 407-410
- Xicheng Wang, Muzheng Xiao, Chao Wang, Xin Jin, Zhijing Zhang, Kiyoshi Takamasu: Distance measurement for rotation center to measurement table using triangulation method, Chinese Society for Optical Engineering Conferences, Proc. of SPIE 10255, 2016, 102553W1-10
- Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: A tunable surface-plasmon-resonance substrate for in-process measurement of micro-stereolithography, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, B6-5
- Shuzou Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Improved back-focal-plane interferometry for monitoring nanoparticle position, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, C2-3
- Kazuki Tachibana, Shouhei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Optical detection of fine particulate defects by autonomous searching liquid probe: Theoretical design of high sensitive phase detection system, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, C2-4
- Bohuai Chu, Masaki Michihata, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi: Calibration of refractive index in microsphere diameter measurement based on analysis of polarized whispering gallery mode, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, C5-3
- Tatsuya Kume, Tsutomu Mibe, Shoichiro Nishimura, Mikio Sakurai, Yutaro Satoh, Wiroj Sudatham, Kiyoshi Takamasu, Hiromasa Yasuda: Precise alignment monitor by using optical frequency comb for the muon g-2/EDM experiment at J-PARC, IWAA2016, International Workshop on Accelerator Alignment, Grenoble, France, 2016
- Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Non-Destructive Optical Depth Inspection of Sub-Diffraction Limit Fine Holes -Theoretical analysis of optical responses based on FDTD method-, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Japan, 2016, A317-8233
- Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: In-process measurement for micro-stereolithography using surface plasmon resonance, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Japan, 2016, P47-8252
- Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Optical Detection of Fine Particulate Defects with Autonomous Search-and-split Liquid Probe -Characteristics analysis of optical detection-, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Shizuoka, Japan, 2016, A307-8210
- Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Non-contact Precision Profile Measurement to Rough Surface Objects with Optical Frequency Combs, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Shizuoka, Japan, 2016, A312-8209
- Yuki Iwaki, Kiyoshi Takamasu, Satoru Takahashi: Development of Advanced Measurement Method of 3D Semiconductor Structure – 3D-Profile Measurement of FinFET using CD-SEM and TEM Images -, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Shizuoka, Japan, 2016, A315-8166
- Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Gian F. Lorusso, Naoto Horiguchi: 3D-Profile Measurement of Advanced Semiconductor Features by Reference Metrology, SPIE Advanced Lithography 2016, San Jose, USA, 2016, 9778 1-4
- Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Fabrication of Functional Microstructures by Multi-Beam Interference Lithography Using Evanescent Light, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Japan, 2016, B103-8177
- Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Absolute precision measurement for space coordinates metrology using an optical-comb pulsed interferometer with a ball lens target, 15th euspen International Conference (euspen2015),Leuven, Belgium, 2015, 109-110
- Chen Meiyun, Genki Miyazaki, Satoru Takahashi, Kiyoshi Takamasu: Roundness measurement machine using multi-beam angle sensor – experimental verification of multi-beam angle sensor, 15th euspen International Conference (euspen2015), Leuven, Belgium, 2015, 125-126
- Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction, 6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015), Harbin, China, 120 1-4
- Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: (Invited Paper) Non-contact precision profile measurement to rough surface objects with optical frequency combs, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 1079 1-5
- Hiromasa Kume, Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Super-Resolution Optical Measurement Method Using Standing Wave Illumination with Three-Beam Interference, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 1094 1-6
- Yumi Iwago, Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu: Self Calibration Method for Nanometer Profile Measurement on Large Aspheric Optical Surface, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 1097 1-6
- Kazuki Tachibana, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: High-sensitive optical measurement of fine particulate defects on Si wafer surface with liquid probe, 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Kyoto Research Park, Kyoto, 2015
- Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: Improvement of lateral shape controlling with nitrogen purge for nano-stereolithography using evanescent light, 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Kyoto Research Park, Kyoto, 2015
- Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Atsuko Yamaguchi, Gian F. Lorusso, Naoto Horiguchi: Line Profile Measurement of Advanced-FinFET Features by Reference Metrology, Proc. of SPIE 9424, SPIE Advanced Lithography, San Jose, USA, 2015, 942406-1
- Satoru Takahashi, Hiroyuki Tahara, Kodai Miyakawa, Kiyoshi Takamasu: Fundamental study on the world’s thinnest layered micro-stereolithography using evanescent light, 2014 ASPE Spring Topical Meeting, Dimensional Accuracy and Surface Finish in Additive Manufacturing, Berkeley, USA, 2014
- Kiyoshi Takamasu, Kyohei Ishikawa, Tomihiko Takamura, Muzheng Xiao, Satoru Takahashi: Nanometer Profile Measurement of Aspheric Surface Using Scanning Deflectometry and Rotating Autocollimator: Self-Calibration Method of Autocollimator, ASPE/ASPEN Summer Topical Meeting 58, Hawaii, USA, 2014, 121-125
- Taro Onoe, Zongluo Yang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Precision measurement technique for rough surface object using self-beat signals of optical frequency comb, 14th euspen International Conference (euspen 2014), Dubrovnik, Croatia, 2014, 181-184
- Hiroyuki Tahara, Kodai Miyakawa, Satoru Takahashi, Kiyoshi Takamasu, Toshimune Nagano: Theoretical Analysis of Spatial Process Resolution of Evanescent Light Exposure for Nano-stereolithography, 15th International Conference on Precision Engineering (ICPE2014), Kanazawa, Japan, 2014, 340-343
- Fumiya Kaji, Yuki Yamaguchi, Satoru Takahashi, Kiyoshi Takamasu: Analysis of TiO2 nanotool handling characteristics for microplastic structures based on laser trapping technique, 15th International Conference on Precision Engineering (ICPE2014), Kanazawa, Japan, 2014, 760-761
- Hirokazu Matsumoto, Kiyoshi Takamasu: Absolute Length-Measuring System by Automatic Interference-Fringe-Peak Detection with Optical-Comb Fiber Interferometer, 11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI2014), Tsukuba, Japan, 2014, A21
- Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Non-Contact Measurement Technique for Dimensional Metrology Using Optical Comb, 11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI2014), Tsukuba, Japan, 2014, A25
- Meiyun Chen, Soichiro Ueda, Satoru Takahashi, Kiyoshi Takamasu: Measurement of Surface Roundness Using a Multi-Beam Angle Sensor, 11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI2014), Tsukuba, Japan, 2014, B02
- Hirokazu Matsumoto, Kiyoshi Takamasu: Distance Measurement Using Temporal-Coherence Interferometer with Optical Frequency Comb and Fiber Etalons, Frontiers in Optics, Tucson, USA, 2014,
- Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sidewall Roughness and Line Profile Measurement of Photoresist and FinFET Features by Cross-Section STEM Image for Reference Metrology, Proc. SPIE 9050, SPIE Advanced Lithography 2014, San Jose, USA, 2014, 90501K-1-7
- H. Yoshigoe, S. Takahashi, K. Takamasu: Experimental Analysis of Laser-Assisted Microfabrication Using TiO2 Nanoparticles, Proceedings of the 13th euspen International Conference (euspen2013), Berlin, Germany, 2013, 80-83
- Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Study on Lateral Resolution Improvement of Laser-Scanning Imaging for Nano Defects Inspection, 11th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2013), Aachen, Germany, 2013
- Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement on Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Autocollimator – Error Analysis and Measurement Experiments by Using Autocollimator with Wide Measuring Range -, 11th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2013), Aachen, Germany, 2013
- Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Non-contact precision distance measurement technique using two optical frequency combs, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
- Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: High-accuracy calibration of CMM using temporal-coherence fiber interferometer with fast-repetition comb laser, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
- Yuki Yamaguchi, Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu: Study on Photocatalyzed Nano-removal Processing Tool for Microstereolithography, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
- Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu: Line Width and Line Profile Measurement of Photoresist Using STEM Images, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
- Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Length Traceability using Optical Frequency Comb, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
- Ryota Kudo, Hiroki Yokozeki, Satoru Takahashi, Kiyoshi Takamasu: Coherent Imaging Algorithm of Super-Resolution Optical Inspection with Structured Light Shift, 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Matsushima, Japan, 2013, 177-181
- K. Miyakawa, R. Matsuzawa, S. Takahashi, K. Takamasu: Development of Hybrid Nano-Stereolithography System Using Evanescent Light and Propagating Light for High Throughput Fabrication, 28th Annual Meeting of the American Society for Precision Engineering (ASPE2013), St. Paul, Minnesota, USA, 2013
- Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotation Devices -Development of Three Dimensional Measuring Facility and Experiment-, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 137-140
- X. N. Wang, S. Takahashi, K. Takamasu, H. Matsumoto: Super-heterodyne Interferometer for Length-Measurement Using the Beat Signal of Laser Diodes and the Optical Frequency Comb, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 259-262
- Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Length measurement based on Pulse repetition interval of a femtosecond optical frequency comb, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 268-271
- Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface with Improved Deflectometry Method – Principle Introduction and Experimental Verification -, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, SS2-O-3 1-4
- H. Matsumoto, X. Wang, K. Takamasu: Absolute Measurement of Base Lines up to 400 m Using Temporal Coherence Heterodyne Interferometer of Optical Frequency Comb, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-12 1-4
- K. Takamasu, S. Takahashi, R. Furutani, M. Abbe: Round Robin Tests of Uncertainty Estimation for Coordinate Metrology by Software Error Propagation, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-15 1-4
- C. Narin, S. Takahashi, K. Takamasu, H. Matsumoto: Step Gauge Measurement Using High-Frequency Repetitions of a Mode-Locked Fiber Laser, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-19 1-5
- R. Kudo, S. Takahashi, K. Takamasu: Design Value Use Type Super-Resolution Optical Inspection for Microfabricated Structure Defects by Using Standing Wave Illumination Shift, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-8 1-4
- Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Comparison Experiment for Pulse Repetition Interval Based Length Measurement Linked to a Femtosecond Optical Frequency Comb, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-P-2 1-4
- Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sub-nanometer calibration of line width measurement and line edge detection by using STEM and sectional SEM, Proc. SPIE Advanced Lithography 2012, San Jose, USA, 2012, 83240X 1-7
- Muzheng Xiao, Satomi Jujo, Kiyoshi Takamasu, Satoru Takahashi: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices – Error Analysis and Experiments -, Proc. euspen2011, Como, Italy, 2011, 129-132
- P. Yang, T. Takamura, S. Takahashi, K. Takamasu, O. Sato, S. Osawa, T. Takatsuji: A motion errors and profile measurement system using three laser interferometers and one autocollimator for a high-precision micro-coordinate measuring machine, Proc. euspen2011, Como, Italy, 2011, 150-153
- Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Experimental evaluation of long path heterodyne interferometers with optical-frequency comb and continuous-wave laser, Proc. ISMTII2011, Daejeon, Korea, 2011, A4-3, 1-5
- Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Experimental analysis of influence of error on super-resolution optical inspection using standing wave illumination, Proc. ISMTII2011, Daejeon, Korea, 2011, A5-4, 1-6
- Guoqing Ding, Xin Chen, Satoru Takahashi, Kiyoshi Takamasu: On-machine profile measurement by multiple sensors scanning method with two kinds of algorithms, Proc. ISMTII2011, Daejeon, Korea, 2011, A7-2, 1-6
- Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: High accuracy gauge block measurement using 2-GHz repetitions mode of a mode-locked fiber laser, Proc. ISMTII2011, Daejeon, Korea, 2011, B4-1, 1-4
- Tomohiko Takamura, Ping Yang, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Development of high precision Coordinate Measuring Machine – Uncertainty analysis of multi-probe method, Proc. ISMTII2011, Daejeon, Korea, 2011, D2-5, 1-6
- Xin Chen, Guoqing Ding, Satoru Takahashi, Kiyoshi Takamasu: Self-calibration for two-dimensional stage using least squares solution, Proc. ISMTII2011, Daejeon, Korea, 2011, E3-1, 1-6
- Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices, Proc. SPIE Optics + Photonics, San Diego, USA, 2011, 81260R 1-7
- Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine, Proc. SPIE Optics + Photonics, 2011, San Diego, USA, 81330T 1-7
- Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Absolute Distance Measurement Using Long-Path Heterodyne Interferometer with Optical Frequency Comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThH3, 1-2
- Hirokazu Matsumoto, Xiaonan Wang, Dong Wei, Satoshi Takahashi, Kiyoshi Takamasu: Interferometric Estimation of the Offset-Frequency of Optical Frequency Comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThH6, 1-2
- Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Pulse repetition interval-based excess fraction method for length measurement directly linked to a femtosecond optical frequency comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThU6, 1-2
- D. Wei, N. Wu, K. Takamasu, H. Matsumoto: Remote internal diameter measurement of ring gauge based on a low-coherence tandem scheme, Proc. ASPEN2011, Hong Kong, China, 2011, P080 1-6
- Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM, Proc. SPIE AL 2011, San Jose, USA, 2011, 7971 797108 1-8
- Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Calibration for multiple motion errors of X-Y table on micro-coordinate measuring machine (M-CMM) by utilizing multi-probe scanning method, ISUPEN2011, International Symposium on Ultraprecision Engineering and Nanotechnology, Tokyo, Japan, 2011
- Satoru Takahashi, Takayoshi Oshima, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu: Dynamic Control of Lateral Evanescent Light Distribution for Microstereolithography, Proc. of the 6th International Conference on Micro Manufacturing, Tokyo, Japan, 2011, 327-330
- Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring multiple motion errors of X-Y table in micro-coordinate measuring machine, The 3rd GMSI International Symposium, Tokyo, Japan, 2011, 135
- K. Takamasu, K. Kuwabara, S. Takahashi, T. Mizuno, H. Kawada: Sub-nanometer Uncertainty Evaluation of Line Width Measurement by Si Lattice Structures of STEM Image, Proc. of the euspen International Conference, Delft, Netherlands, euspen2010, 2010, 116-119
- W. Agustinus, A. Hirai, S. Takahashi, K. Takamasu, H. Matsumoto: Improvement of Gauge Block Measurement Without Wringing Using Tandem Low-coherence Interferometer, Proc. of the euspen International Conference, Delft, Netherlands, euspen2010, 2010, 237-240
- Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Mirror – Enlarging Measuring Range of Autocollimator -, Proc. 10th ISMQC, Osaka, Japan, 2010, B3-017-1-4
- Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Resolution Characteristics of Super-Resolution Optical Inspection Using Standing Wave Illumination, Proc. 10th ISMQC, Osaka, Japan, 2010, B3-134-1-4
- Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Advanced Absolute Length Metrology Based on Pulse Trains’ Constructive Interference – Towards Measurements of Meter Order with an Accuracy of Nano Order -, Proc. 10th ISMQC, Osaka, Japan, 2010, C1-001-1-4
- Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: New Optical Distance Measurement Without a Prism Refractor Using an Optical Frequency Comb Laser, Proc. 10th ISMQC, Osaka, Japan, 2010, D4-062-1-4
- Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Super-Heterodyne Interferometric Length Measurement Using the Repetition Frequency of an Optical Frequencies Comb, Proc. 10th ISMQC, Osaka, Japan, 2010, E1-047-1-4
- Ping Yang, Shusaku Shibata, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: A Three Laser Interferometers and One Autocollimator System for Measuring the Yaw and Straightness Errors of a X-Y Stage on High Precision CMM, Proc. 10th ISMQC, Osaka, Japan, 2010, E3-058-1-4
- Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Height Measurement of a Particle in Evanescent Field Controlling Penetration Depth, Proc. 10th ISMQC, Osaka, Japan, 2010, E5-139-1-4
- Kiyoshi Takamasu: Uncertainty Estimation for Profile Measurement by Multi-Sensors Method, Proc. 10th ISMQC, Osaka, Japan, Plenary Lecture, 2010
- Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: A novel length measurement interferometer based on a femtosecond optical frequency comb introduced multi-pulse trains’ interference, Proc. EOS 2010, Paris, France, 2010, 3209
- Satoru Takahashi, Keisuke Matsuda, Hisamichi Yoshigoe, Kiyoshi Takamasu: Laser Direct Fabrication of Three-Dimensional Microstructures Using Photocatalyst Nanoparticles, Proc. of 4th CIRP International Conference of High Performance Cutting 2010, Gifu, Japan, 2010, 381-384
- Satoru Takahashi, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu: A Novel Exposure Method Based on Dissolved Oxygen Control for Nano-Stereolithography Using Evanescent Light, Proc. ASPE2010, Atlanta, USA, 2010, 373-376
- Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Femtosecond optical frequency comb’s temporal coherence characteristic-based high-accuracy distance measurement, Proc. PGC 2010, Singapore, 2010, 1-6
- Kiyoshi Takamasu, Kazuki Kuwabara, Satoru Takahashi, Takeshi Mizuno, Hiroki Kawada: Sub-nanometer Calibration of CD-SEM Line Width by Using STEM, SPIE Advanced Lithography, SPIE 7638 – 55, 2010, 1-12
- Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Application of femtosecond optical frequency comb’s temporal coherence character to a distant estimation, 4th Pacific International Conference on Applications of Lasers and Optics (PICALO), 2010
- Satoru Takahashi, Kiyoshi Takamasu: Micro 3-D Fabrication and Nano Scale Metrology by Controlling Localized Light Energy, 4th TU-SNU-UT Joint Symposium, 2010, 12
- Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Temporal coherence of a femtosecond optical frequency comb and applied quantity metrology applications, 4th TU-SNU-UT Joint Symposium, 2010, 52
- S. Takahashi, R. Kudo, S. Okada, S. Usuki, K. Takamasu: Experimental verification of super-resolution microscopy using standing evanescent light with image retrieval, euspen 2009, 2009, 171-174
- Kiyoshi Takamasu, Satoru Takahashi, Wang Tao, Ryoshu Furutani, Makoto Abbe: Uncertainty evaluation for coordinate metrology by intelligent measurement, ISMTII2009, 2009, 1 006-010
- Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Study on the Temporal Coherence Function of a Femtosecond Optical Frequency Comb, SPIE Europe Optical Metrology 2009, SPIE 7389, 2009, 73891R 1-8
- Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Femtosecond Optical Frequency Comb for Volume Temperature Change Measurement, 8th Pacific Rim Conference on Lasers and Electro-Optics, 2009
- R. Kudo, S. Usuki, S. Takahashi, K. Takamasu: Fundamental Verification for 2-Dimensional Super-Resolution Optical Inspection for Semiconductor Defects by Using Standing Wave Illumination Shift, IMEKO 2009, 2009, 106-111
- Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Remote Measurement Using a Femtosecond-Optical-Frequency-Comb-Based Interferometer, Tech. Digest of the Eighth Japan-Finland Joint Symposium on Optics in Engineering, 2009, 31-32
- Winarno Agustinus, Akiko Hirai, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Novel Measurement Technique of Gauge Block Without Wringing Using a Tandem Low-coherence Interferometer, ASPEN2009, 2009, 1A2-5-1807
- Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Advanced optical metrology of geometrical quantity based on pulse trains’ destructive interference, ASPEN2009, 2009, 1D-13-1890p
- Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu: In-process visualization of laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles, ASPEN2009, 2009, 2C-6-2009-p
- Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Algorithm for 2-Dimensional Super-Resolution Optical Inspection for Semiconductor Defects by Using Standing Wave Illumination, ASPEN2009, 2009, 2D-12-2273-p
- Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: New optical distance measurement without prism using an optical frequency comb laser, ASPEN2009, 2009, 2P10-3p
- Shin Usuki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Resolving Power Improvement for Optical Nano-Defect Measurement by using Sub-Pixel Sampling based on Structured Illumination Shift Method, ASPEN2009, 2009, 2P10-8p
- Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Application of femtosecond optical frequency comb’s temporal coherence characteristic to evaluation of experimental environment, Optics Frontier 2010 Laser Technology Forum and Outstanding Achievements Release Conference of Chinese Optics 2009, LTFO-2010-2017
- S. Takahashi, T. Nagao, S. Minamiguchi, S. Usuki, K. Takamasu: Development of residual layer thickness measurement system for nano-imprint lithography based on near-field optics, euspen 2008, 2008, 295-299
- F.Iida, T. Akagawa, T. Hashimoto, Y. Jimbo, K. Takamasu, Y. Kawaguchi, K. Kotani: Evaluation of the interactive computer graphics that reflects cardiac vagal activity estimated in real-time, ASIAGRAPH2008 in Tokyo Proceedings, 2008, 220-223
- X. Chen, K. Kotani, K. Takamasu: Study on Algorithm of Reconstructing Topography Based on Topography Difference, euspen 2007 (Germany), 2007, 365-368
- G. Olea, S. Rathmann, J. Hesselbach, K. Takamasu: Developments for a High Precision Positioning Systems Family with Parallel Structure and Short Planar Motion, euspen 2007 (Germany), 2007, 485-488
- S. Takahashi, M. Okuno, Y. Kajihara, K. Takamasu: Development of laser-assisted microfabrication system for three-dimensional metal structures by photocatalysis, euspen 2007 (Germany), 2007, 529-532
- K. Takamasu, S. Takahashi, M. Abbe, R. Furutani: Uncertainty Estimation for Coordinate Metrology: Calibration, Form Deviation and Strategy of Measurement, ISMTII2007 (Japan), 2007, 1-4
- S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu: Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light, ISMTII2007 (Japan), 2007, 45-48
- Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu: An Optical and Confocal Microscopic System for Nano-stereolithography Using Evanescent Light, ISMTII2007 (Japan), 2007, 79-82
- Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kiyoshi Takamasu: Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System, ISMTII2007 (Japan), 2007, 231-234
- S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu: Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift, ISMTII2007 (Japan), 2007, 387-390
- X. Chen, K. Takamasu: Study on Scanning Squareness Measurement Method and Uncertainty Estimation, ISMTII2007 (Japan), 2007, 437-440
- M. Nara, M. Abbe, K. Takamasu: Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data, ISMTII2007 (Japan), 2007, 815-818
- M. Abbe, M. Nara, K. Takamasu: Uncertainty Evaluation of CMM by Modeling with Spatial Constraint, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 121-125
- S. Minamiguchi, S. Usuki, S. Takahashi, K. Takamasu: Thin Film Thickness Measurement for Evaluation of Residual layer of Nano-Imprint Lithography Using Near-Field Optics, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 167-172
- Kiyoshi Takamasu, Keisuke Yoshida, Tatsuya Senoo, Xin Chen, Kiyoshi Kotani, Satoru Takahashi: Calibration of 6 DOF Parallel Mechanism Driven by Planar Motors, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 178-183
- Gheorghe Olea, Tony Postiau, Benoit Raucent, Kiyoshi Takamasu: A New 4DOF Desktop Parallel Manipulation System (D-PMS) – Kinematic Analysis and Performance Evaluation, 7th National Congress on Theoretical and Applied Mechanics, Mons, Belgium, 2006
- S. Liu, S. Nagasawa, S. Takahashi, K. Takamasu: Development of Multi-Ball-Cantilever AFM System for Measuring the Profile of Soft Thin Film Surface, euspen 2006, Baden, Austria, 2006, 462-465
- Hiroaki Nishioka, Satoru Takahashi, Kiyoshi Takamasu: A Super-Resolution Microscopy with Standing Evanescent Light and Image Reconstruction Method, IMEKO XVIII World Congress, Brazil Rio de Janeiro, 2006
- Masaki Okuno, Tasuku Aso, Satoru Takahashi, Kiyoshi Takamasu: A Novel Microfabrication Technique for Three-Dimensional Metal Structures by Photocatalysis, ASPE 2006 (21st Annual Meeting), Monterey USA, 2006
- Yusuke Kajihara, Toru Takeuchi, Satoru Takahashi, Kiyoshi Takamasu: Development of a nano-stereolithography system using evanescent light for submicron fabrication, ASPE 2006 (21st Annual Meeting), Monterey USA, 2006
- S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu: Development of super-resolution optical inspection system for semiconductor defects using standing wave illumination shift, Proc. of SPIE Vol. 6375, Boston USA, 2006, 637508
- Gheorghe Olea, Kiyoshi Takamasu, Benoit Raucent: Precision Multi-Degrees-Of-Freedom Positioning Systems – Modular Design for Assembly Applications -, International Precision Assembly Seminar 2006 (IPAS 2006), (Bad Hofgastein, Austria, 19-22 February 2006), 2006, 251-262
- Masao Sugi, Makoto Nikaido, Yusuke Tamura, Jun Ota, Tamio Arai, Kiyoshi Kotani, Kiyoshi Takamasu, Seiichi Shin, Hiromasa Suzuki, Yoichi Sato: Motion Control of Self-Moving Trays for Human Supporting Production Cell “Attentive Workbench”, Proc. of the 2005 IEEE International Conference on Robotics and Automation (ICRA 2005) (Barcelona, Spain), 2005, 4091-4096
- S. Usuki, T. Nakano, S. Takahashi, K. Takamasu: Computer Simulation of Nano-Void Inspection in Low-k Dielectric Materials Using Near-Field Optics, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 85-88
- R. Furutani, K. Shimojima, K. Takamasu: Self-Calibration of CMM with Redundant Degree of Freedom, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 173-176
- G. Olea, O. Sato, H. Kiyosawa, S. Takahashi, K. Takamasu: Experimental Method and Device for Spherical Joints Accuracy Evaluation, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 475-478
- Makoto Nikaido, Masao Sugi, Yusuke Tamura, Jun Ota, Tamio Arai, Kiyoshi Kotani, Kiyoshi Takamasu, Akio Yamamoto, Seiichi Shin, Hiromasa Suzuki, Yoichi Sato: Arrangement Planning for Multiple Self-Moving Trays in Human Supporting Production Cell “Attentive Workbench”, Proc. of the 2005 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2005) (Edmonton, Canada), 2005, 3880-3885
- K Takamasu, O Sato, K Shimojima, S Takahashi, R Furutani: Estimation of uncertainty of measurements of 3D mechanisms after kinematic calibration, ISMTII2005 (Huddersfield, UK), Sep 6-8, 2005
- K. Kotani, M. Tachibana, K. Takamasu: Investigation of the influence of swallowing, coughing, and vocalization on heart rate variability with respiratory-phase domain analysis, Proc. of the IFMBE/IMIA 5th International Workshop on Biosignal Interpretation(Tokyo, Japan), 2005, 17-20
- Satoru Takahashi, Yuichi Inazuki, Yusuke Kajihara, Kiyoshi Takamasu: Photofabrication of Periodic Submicron Structures Using Standing Evanescent Light for Nano-Stereolithography, 20th Annual ASPE Meeting (Oct 9-14, 2005, Norfolk, Virginia, USA), 2005, 1729-1732
- S Liu, S Nagasawa, S Takahashi, K Takamasu: Profile Measurement of Resist Surface Using Multi-Ball-Cantilever AFM, Proc. of SPIE International Symposium on Optomechatronic Technologies (ISOT 2005) (December, Sapporo) Vol.6049, 2005, 604903-1-9
- S. Uski, H. Nishioka, S. Takahashi, K. Takamasu: Super-resolution optical inspection for semiconductor defects using standing wave shift, Proc. of SPIE International Symposium on Optomechatronic Technologies (ISOT 2005) (December, Sapporo) Vol.6049, 2005, 60490C-1-11
- X. Chen, K. Kotani, S. Takahashi, K. Takamasu: Development of Multiple Small Linear Planar Motor System, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 – June 2), 2004, 252-253
- S. Usuki, K. Enami, O. Sato, S. Takahashi, K. Takamasu: Improving the Accuracy of 3D Displacement Measurement using Ring-Shaped Laser Beam and High Resolution CCD, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 – June 2), 2004, 328-329
- O. Sato, K. Shimojima, G. Olea, R. Furutani, K. Takamasu: Full Parameter Calibration of Parallel Mechanism, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 – June 2), 2004, 396-397
- M. Sugi, Y. Tamura, J. Ota, T. Arai, K. Takamasu, K. Kotani, H. Suzuki, Y. Sato: Attentive workbench: An intelligent production cell supporting human workers, 7th International Symposium on Distributed Autonomous Robotic Systems (DARS 04) (Toulouse, France 23-25 June), 2004, 441-450
- S. Takahashi, R. Nakajima, T. Miyoshi, Y. Takaya, T. Yoshioka, T. Hariyama, K. Kimura, T. Nakao, K. Takamasu: Nano-Defects Inspection of Semiconductor Wafer using Evanescent Wave, International Symposium on Photonics in Measurement, 23/24 June, Frankfurt, Germany, 2004, 307-316 (Plenary Presentation)
- M. Sugi, Y. Tamura, J. Ota, T. Arai, K. Kotani, H. Suzuki, K. Takamasu, Y. Sato: Distributed control of multiple self-moving trays for an Intelligent cell production system, Proc. of The SICE Annual Conf. 2004 (Sapporo, Japan, 4-6 Aug), 2004, 2506-2511
- R. Furutani, K. Shimojima, K. Takamasu: Parameter Calibration for non-Cartesian CMM, 8th International Symposium on Measurement and Quality Control in Production (ISMQC2004) (Oct 12-15, 2004, Erlangen, Germany), 2004, 317-326 (Plenary Presentation)
- K. Takamasu, S. Koga, S. Takahashi, M. Abbe, R. Furutani S. Ozono: Evaluation of Uncertainty by Form Deviations of Measured Workpieces in Specified Measuring Strategies, 8th International Symposium on Measurement and Quality Control in Production (ISMQC2004) (Oct 12-15, 2004, Erlangen, Germany), 2004, 535-540
- Y. Kajihara, Y. Inazuki, S. Takahashi, K. Takamasu: Study of Nano-Stereolithography Using Evanescent Light, American Society for Precision Engineering (ASPE2004Annual Meeting, Florida, USA, Oct. 24 – 29), 2004, 149-152
- M. Fujiwara, K. Takamasu, S. Ozono: Evaluation of Properties of Nano-CMM by Thermal Drift and Tilt Angle, Proc. XVII IMEKO World Congress (June, Dubrovnik, Croatia), 2003, 1794-1797
- R. Furutani, K. Shimojima, K. Takamasu: Kinematical Calibration of Articulated CMM Using Multiple Simple Artifacts, Proc. XVII IMEKO World Congress (June, Dubrovnik, Croatia), 2003, 1798-1801
- K. Takamasu, K. Nosaka, M. Abbe, R. Furutani, S. Ozono: Estimation of Uncertainty from Unknown Systematic Errors in Coordinate Metrology, Proc. XVII IMEKO World Congress (June, Dubrovnik, Croatia), 2003, 1834-1837
- K. Shimojima, R. Furutani, K. Takamasu, K. Araki: The Estimation Method of Uncertainty of Articulated Coordinate Measuring Machine, Proc. XVII IMEKO World Congress (June, Dubrovnik, Croatia), 2003, 1844-1847
- K. Kotani, K. Takamasu, L. Safonov, Y. Yamamoto: Multifractal heart rate dynamics in human cardiovascular model, Proceedings of SPIE 5110 (June), 2003, 340-347
- H. Suzuki, F. Kimura, T. Arai, K. Takamasu, J. Ota, A. Yamamoto, K. Kotani, M. Sugi: An Overview of Attentive Workbench (AWB), Symposium on Real World Information Systems (Sept., Tokyo), 2003, 65-66
- I. Misumi, S. Gonda, Qiangxian Huang, Taeho Keem, T. Kurosawa, K. Takamasu: Development of nanometrological, dimensional standards in NMIJ, Proc. Korea-Japan Joint Symposium on Nanoengineering 2003 (Nov., Korea), 2003, 123-126
- T. Yoshioka, T. Miyoshi, Y. Takaya, S. Takahashi, K. Takamasu: Study on particle detection for patterned wafers by evanescent light illumination -evanescent light scattering simulation by means of FDTD method-, Proceedings of the International Conference on Leading Edge Manufacturing in 21st Century (LEM21)(Nov., Niigata), 2003, 129-132
- I. Misumi, S. Gonda, T. Kurosawa, Y. Azuma, T. Fujimoto, I. Kojima, T. Sakurai, T. Ohmi, K. Takamasu: Uncertainty in Measurements of Micropatterned Thin Film Thickness Using Nanometrological AFM, Proceedings of Machines and Processes for Micro-scale and Meso-scale Fabrication, Metrology and Assembly, ASPE 2003 Winter Topical Meeting, Florida, USA,2003, 58-63
- O. Sato, H. Ishikawa, M. Hiraki, K. Takamasu: The Calibration of Parallel-CMM: Parallel-Coordinate Measuring Machine, euspen2002, Holland, 2002, 573-576
- I. Misumi, S. Gonda, T. Kurosawa, Y. Tanimura, N. Ochiai, J. Kitta, F. Kubota, M. Yamada, Y. Fujiwara, Y. Nakayama, K. Takamasu: Comparing Measurements of 1D-Grating Samples Using Optical Diffraction Technique, CD-SEM and nanometrological AFM, euspen2002, Holland, 2002, 517-520
- R. Furutani, K. Shimojima, K. Takamasu: Parameter Calibration of Articulated CMM, euspen2002, Holland, 2002, 605-608
- M. Abbe, K. Takamasu: Modelling of Spatial Constraint in CMM Error for Uncertainty Estimation, euspen2002, Holland, 2002, 637-640
- Gheorghe Olea, Osamu Sato, Kiyoshi Takamasu: Parallel CMM – A New Development: Mechanical Design and Calibration Results, Proceedings of the 33rd ISR (International Symposium on Robotics), Sweden, 2002, 221-229
- Sinlapeecheewa and K. Takamasu: 3D Profile Measurement by Color Pattern Projection and System Calibration, IEEE ICIT’02, Bangkok, Thailand, 2002, 405-410
- K. Takamasu, I. Murui, O. Sato, G. Olea and R. Furutani: Calibration of Three Dimensional Mechanism – Novel Calibration Method for 3DOF Parallel Mechanism -, IEEE ICIT’02, Bangkok, Thailand, 2002, 394-398
- K. Shimojima, R. Furutani, K. Takamasu and S. Ozono: The Estimation Method of Uncertainty of Articulated Coordinate Measuring Machine, IEEE ICIT’02, Bangkok, Thailand, 2002, 411-415
- Gheorghe Olea, Kiyoshi Takamasu, Shigeo Ozono: Spatial Parallel Mechanism with 2DOF L-L Actuators, ISR2001, Korea, 2001, 1129-1134
- Kiyoshi Kotani, Kiyoshi Takamasu, Shigeo Ozono, Yoshiharu Yamamoto: A Model for Cardio-Respiratory Synchronization, 6th SIAM Conf. on Applications of Dynamical Systems, USA, 2001, 137-138
- K. Takamasu, M. Fujiwara, A. Yamaguchi, M. Hiraki and S. Ozono: Evaluation of Thermal Drift of Nano-CMM, Euspen2001, Torino, Italy, 2001, 306-309
- M. Fujiwara, A. Yamaguchi, K. Takamasu and S. Ozono: Evaluation of Stages of Nano-CMM, ICPE2001, Yokohama, Japan, 2001, 634-638
- O. Sato, M. Hiraki, K. Takamasu and S. Ozono: Calibration of 2-DOF Parallel Mechanism, ICPE2001, Yokohama, Japan, 2001, 734-738
- K. TAKAMASU, M. ABBE, R. FURUTANI and S. OZONO: Estimation of Uncertainty in Feature-Based Metrology, ISMTII2001, Egypt, 2001, 47-52
- Chih-Chea Kuo, K. Takamasu, A. Yamamoto, K. Sunouchi, S. Wada, K. Kase, H. Tashiro: Wavelength Scanning Interferometer for Surface Profile Measurement, Proc. 6th Int. Conf. on Automation Technology, 2000, 205-209
- R.Furutani, K.Matsuoka, K.Takamasu: Parameter Calibration for Self-Referenced Pattern Projection Method, Proc. Mechatronics 2000, 2000, 384-387
- K. Takamasu, M. Fujiwara, H. Naoi, S. Ozono: Friction Drive System for Nano-CMM, Proc. Mechatronics 2000, 2000, 565-568
- M. Abbe, K. Takamasu, S. Ozono: Reliability of Parametric Error on Calibration of CMM, IMEKO-XVI World Congress, 2000, 180-184
- K. Enami, M. Hiraki, K. Takamasu: Nano-Probe Using Optical Sensing, IMEKO-XVI World Congress, 2000, 345-348
- M.Hiraki, K. Takamasu, S. Ozono: Obstacle Detection Using Ring Beam System, IMEKO-XVI World Congress 2000, 589-593
- G. Olea, M. Hiraki, K. Takamasu, S. Ozono: Kinematics Analysis, Simulation and Design of a Parallel Mechanism with R-L Actuators, Proc. Parallel Kinematic Machines Int. Conf. 2000, 2000, 297-305
- Kiyoshi Takamasu, Masahiko Hiraki, Kazuhiro Enami, Shigeo Ozono: Development of Nano-CMM and Parallel-CMM – CMM in the 21th Century -, Int. Dimensional Metrology Workshop, 1999
- K. Takamasu, R. Furutani, S. Ozono: Statistical Evaluation of Minimum Zone Method in Coordinate Metrology, IMEKO-XV World Congress, 1999, 101-106
- M. Hiraki, N. Yoshikawa, K. Takamasu, S. Ozono: Development of 3 DOF Parallel-CMM, IMEKO-XV World Congress, 1999, 123-128
- K. Enami, C-C. Kuo, T. Nogami, M. Hiraki, K. Takamasu, S. Ozono: Development of nano-Probe System Using Optical Sensing, IMEKO-XV World Congress, 1999, 189-192
- Chih-Chea Kuo, A. Suzuki, M. Hiraki, R. Furutani, K. Takamasu, S. Ozono: Development of Touch Trigger Type Pneumatic Ball Probe, IMEKO-XV World Congress, 1999, 193-200
- K. Takamasu, Guo B-W., R. Furutani, S. Ozono: Basic Concept of Feature Based Metrology, Proc. ISMQC’98, Wien Austria, 1998, 637-642.
- Kiyoshi Takamasu, Kenji Nogami, Kazuhiro Enami, Shigeo Ozono: Development of Nano-Probe System for Nano-CMM, Proc. China-Japan Bilateral Symposium on Advanced Manufacturing Engineering, China, 1998, 124-129
- Kiyoshi Takamasu, Ryoshu Furutani, Shigeo Ozono: Development of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution), Proc. XIV IMEKO World Congress, Finland, 1997, 34-39
- Ryoshu Furutani, Hidemitsu Asano, Kiyoshi Takamasu, Shigeo Ozono: 3D Profile Measurement by Self-referenced Pattern Projection, Proc. XIV IMEKO World Congress, Finland, 1997, 190-195
- Chien-Ming Chen, Keiichi Wakida, Masahiko Hiraki, Kiyoshi Takamasu, Shigeo Ozono: A New Method for Measuring the Viscoelastic Twist Properties of Nematic Liquid Crystals by Evanescent-Wave Scattering, Proc. SPIE’s 42nd Annual Meeting, San Diego, 1997, 146-153
- Kiyoshi Takamasu, Masahiko Hiraki, Ryoshu Furutani, Shigeo Ozono: Statistical Evaluation of Form Deviations in Coordinate Metrology, Proc. 9th IPES, Germany, 1997, 90-95
- Masahiko Hiraki, Nobuhiro Yoshikawa, Kiyoshi Takamasu, Shigeo Ozono: Parallel-CMM (Parallel-Coordinate Measuring Machine), Proc. 9th IPES, Germany, 1997, 363-366
- Kiyoshi Takamasu, Kuo Chih-Che, Akihiro Suzuki, Masahiko Hiraki, Ryoshu Furutani, Shigeo Ozono: Development of Pneumatic Ball Probe for Measuring Small Hole, Proc. ICPE’97, Taiwan, 1997, 767-771
- Sonko Osawa, Kazuhiro Enami, Ryoshu Furutani, Kiyoshi Takamasu, Shigeo Ozono: 3D-Profile Measurement by Self-referenced Pattern Projection Method – Application to the measurement of small objects -, Proc. ICPE’97, Taiwan, 1997, 817-821
- Ryoshu Furutani, Sonko Osawa, Kazuhiro Enami, Kiyoshi Takamasu, Shigeo Ozono: Quality of Projection Patterns in Self-referenced Pattern Projection Method, Proc. ICPE’97, Taiwan, 1997, 829-833
- Kiyoshi Takamasu, Satoshi Ozawa, Takayuki Asano, Akihiro Suzuki, Ryoshu Furutani: Basic Concepts of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution), Japan-China Bilateral Symposium on Advanced Manufacturing Eng., 1996, 155-158
- Sonko Osawa, Ryoshu Furutani, Kiyoshi Takamasu, Shigeo Ozono: Hidemitsu Asano, Profile Measurement by Combination Projection Method, Japan-China Bilateral Symposium on Advanced Manufacturing Eng., 1996, 207-211
- R. Furutani, H. Asano, K. Takamasu, S. Ozono: Profile Measurement by Comparing Multi-Gray Scale Projection with Reference Projection, Proc. 5th ISMQC, 1995, 368-372
- Kiyoshi Takamasu, Ichiro Fukuda, Ryoshu Furutani, Shigeo Ozono: Data Processing Method for Geometrical Forms with Form Deviations in Coordinate Metrology, Proc. 4th CIRP Seminar on Comp. Aided Tolerancing, 1995, 301-311
- Cheng Yuhui, Takanori Ikegami, Kiyoshi Takamasu, Shigeo Ozono: Sensing Strategy and Recognizing Attractor, Proc. IEEE Int. Conf. Multisensor Fusion and Integration for Intelligent Systems, 1994, 169-174
- Kiyoshi Takamasu, Kazuhiko Kawakami, Shigeo Ozono: Development of Optical Fiber Probes for NFSOM (Near-Field Scanning Optical Microscope), 4th Nanotechnology Symposium, 1994, 55-59
- Koichiro Okamura, Kiyoshi Takamasu, Shigeo Ozono, Ryoshu Furutani: Calibration of a Manipulator via the Product-of-Exponentials, 2nd Japan-France Cong. on Mechatronics, 1994, 400-403
- Kiyoshi Takamasu: Measurement System for Multiple Degree of Freedom Moving Robot, J. Robotics Mechatronics, 5(5), 1993, 453-456
- Kiyoshi Takamasu, Atushi Kobaru, Ryoshu Furutani, Shigeo Ozono: Three Dimensional Position Sensor Using Optical Collimator for Nanometer Resolution, 7th Int. Prec. Eng. Seminar, 1993, 62-65
- Kiyoshi Takamasu, Tetuo Uekawa, Kazuhiko Kawakami, Shigeo Ozono, Ryoshu Furutani: Profile Measurements Using Multi-Gray Scale Pattern Projection, 2nd Int. Symp. on Measurement Tech Intell. Instruments. 1993, 93-109
- Kiyoshi Takamasu, Atushi Kobaru: Three Dimensional Position Measurement Using Optical Collimation, 3rd International Nanotechnology Symposium, 1992, 23-26
- Kiyoshi Takamasu: Measuring System for Multi-Freedom Robot, Proc. 1st Japanese-French Congr. Mechatronics, 1992, 125-130
- Kiyoshi Takamasu, Atushi Kobaru, Ryoshu Furutani, Shigeo Ozono: Three Dimensional Position Measurement Using Critical Angle Prism, Proc. ISMQC, 1992, 193-201
- Kiyoshi Takamasu, T. Kasahara: Three Dimensional Position Measurement of Spherical Target Using Optical Collimator, Proc. ISMQC, Aachen, 1989, 87-92
- Kiyoshi Takamasu, Yasuhiko Endoh: Profile Measurement of Reflector by Image Processing Using LED Display Unit, Proc. ISPMIE, Shanghai, 1987, 507-510
- J. Kato, T. Tanaka, S. Ozono, M. Shizawa, K. Takamasu: A Real-Time Profile Restoration Method from Fringe Patterns Using Digital Signal Processing, Proc. ISPMIE, Shanghai, 1987, 489-492
- S. Ozono, J. Kato, M. Hirata, K. Takamasu: Sensor for Guiding Mobile Robot, Proc. ISPMIE, Shanghai, 1987, 493-495
- Shigeo Ozono, Kiyoshi Takamasu, Junichi Kato, Masayuki Hirata: Application of High-Speed Distance Sensor to Guidance for Mobile Robot, Proc. IMEKO TC14, 1986, 51-58
- Kiyoshi Takamasu, Ryoshu Furutani, Shigeo Ozono: Development of the Three Dimensional Coordinate Measuring System with Ultra-Sonic Sensors, Proc. of 1st ISMQC, 1984, 300-305