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学術論文

2020.08.04

高増潔が関係した学術論文および著書のリストです．（2020年4月）
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  1. Kazuki Tachibana, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: Verification of proposed concept, Precision Engineering 61, 2020, 93–102
  2. Meiyun Chen, Shengli Xie, Heng Wu, Satoru Takahashi, Kiyoshi Takamasu: Three-dimensional surface profile measurement of a cylindrical surface using a multi-beam angle sensor, Precision Engineering 62, 2020, 62–70

  3. Shuzo Masui, Yuki Torii, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Fabrication of nano/micro dual-periodic structures by multi-beam evanescent wave interference lithography using spatial beats, Optics Express 27 (22), 2019, 31522
  4. Meiyun Chen, Shengli Xie, Heng Wu, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: Spectroscopic interferometer with a large length range by rotating diffraction grating, Optics Express 27 (8), 2019, 10553-10563
  5. S. Takahashi, D. Kong, M. Michihata, K. Takamasu: In-process measurement for cure depth control of nano stereolithography using evanescent light, CIRP Annals – Manufacturing Technology 68, 2019, 527-530
  6. Shiwei Ye, Satoru Takahashi, Masaki Michihata, Kiyoshi Takamasu, Hans Nørgaard Hansen, Matteo Calaon: Quantitative depth evaluation of microgrooves on polymer material beyond the diffraction limit, Precision Engineering 59, 2019, 56-65
  7. Meiyun Chen, Dong Wei, Guoxu Zhou, Heng Wu, Hirokazu Matsumoto, Kiyoshi Takamasu, Satoru Takahashi, Shengli Xie: Absolute distance measurement based on spectral interferometer using the effect of the FSR of a Fabry-Perot etalon, Optics and Lasers in Engineering 123, 2019, 20-27
  8. Agustinus Winarno, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: A new measurement method to simultaneously determine group refractive index and thickness of a sample using low-coherence tandem interferometry, Precision Engineering 55, 2019, 254-259
  9. Yuka Miura, Shoichi Nakanishi, Eiichi Higuchi, Kiyoshi Takamasu, Makoto Abe, Osamu Sato: Comparative evaluation of estimation of step gauge measurement uncertainty via Monte Carlo simulation, Precision Engineering 55, 2019, 390-396
  10. Yuka Miura, Shoichi Nakanishi, Eiichi Higuchi, Kiyoshi Takamasu, Makoto Abe, Osamu Sato: Comparative evaluation of estimation of hole plate measurement uncertainty via Monte Carlo simulation, Precision Engineering 56, 2019, 496-505

  11. Michihata, Kiyoshi Takamasu: Modified Linnik microscopic interferometry for quantitative depth evaluation of diffraction-limited microgroove, Measurement Science and Technology 29 (5), 2018, 54011 1-9
  12. Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: In-Process Measurement of Thickness of Cured Resin in Evanescent-Wave-Based Nano-stereolithography Using Critical Angle Reflection, Nanomanufacturing and Metrology, 2018, 1:112-124
  13. Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: In-process Measurement of Gradient Boundary of Resin in Evanescent-wave-based Nano-stereolithography using Reflection Interference near Critical Angle, Journal of Photopolymer Science and Technology 31 (3), 2018, 441-446
  14. 松野茂，沼田崇志，岩橋利英，高増潔，小谷潔，神保泰彦: 組み替えおよび分解可能な超音波検査ロボットの開発と校正手法の提案, 電気学会誌論文誌C 138 (9), 2018, 1133-1140
  15. Kiyoshi Takamasu, Satoru Takahashi, Hiroki Kawada, Masami Ikota: Linewidth roughness of advanced semiconductor features using focused ion beam and planar-transmission electron microscope as reference metrology, Journal of Micro/Nanolithograpy MEMS and MOEMS 17(4), 2018, 041010 1-7
  16. Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: One-shot stereolithography for biomimetic micro hemisphere covered with relief structure, Precision Engineering 54, 2018, 353-360
  17. Agustinus Winarno, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu: Noncontact method of point-to-point absolute distance measurement using tandem low-coherence interferometry, Measurement Science and Technology 29, 2018, 025006, 1-8
  18. Masaki Michihata, Jonggang Kim, Satoru Takahashi, Kiyoshi Takamasu, Yasuhiro Mizutani, Yasuhiro Takaya: Surface Imaging Technique by an Optically Trapped Microsphere in Air Condition, Nanomanufacturing and Metrology, 2018, 1, 32-38
  19. 道畑正岐，儲博懐，趙正，林晃平，高増潔，高橋哲：Whispering Gallery Mode共振を用いたマイクロ球の直径計測, 精密工学会誌 84 (1), 2018, 77-84
  20. 大西徹，高増潔: 温度環境を考慮した三次元測定機の高度化（第1報　目盛誤差による温度測定誤差の評価）, 設計工学 53 (4), 2018, 313-322

  21. Masaki Michihata, Shin-ichi Ueda, Satoru Takahashi, Kiyoshi Takamasu, Yasuhiro Takaya: Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale, Optical Engineering 56 (6), 2017, 064103 1-9
  22. S. Takahashi, C. Jin, S. Ye, M. Michihata, K. Takamasu: Theoretical analyses of in-process depth measurements of fine microgrooves based on near-field optical response, CIRP Annals – Manufacturing Technology 66, 2017, 503-506
  23. Tingzhi Hu, Muzheng Xiao, Xicheng Wang, Chao Wang, Zhijing Zhang, Kiyoshi Takamasu: High-Precision Aspheric Surface Measurement Using Scanning Deflectometry: Three-Dimensional Error Analysis and Experiments, IJAT 11 (5), 2017, 728-735
  24. Masaki Michihata, Deqing Kong, Kiyoshi Takamasu, Satoru Takahashi: A Simulation Study of Plasmonic Substrate for In-Process Measurement of Refractive Index in Nano-Stereolithography, IJAT 11 (5), 2017, 772-780

  25. Chen Meiyun, Takahashi Satoru, Takamasu Kiyoshi: Calibration for the sensitivity of multi-beam angle sensor using cylindrical plano-convex lens, Precision Engineering 46, 2016, 254-262
  26. Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Is the Two-Color Method Superior to Empirical Equations in Refractive Index Compensation?, Optics and Photonics Journal 2016 (6), 2016, 8-13
  27. Chen Meiyun, Takahashi Satoru, Takamasu Kiyoshi: Multi-Beam Angle Sensor for Flatness Measurement of Mirror using Circumferential Scan Technology, International Journal of Precision Engineering and Manufacturing 17 (9), 2016, 1093-1099
  28. Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Non-contact precision profile measurement to rough-surface objects with optical frequency combs, Measurement Science Technology 27, 2016, 124002-1-7
  29. Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Non-contact measurement technique for dimensional metrology using optical comb, Measurement 78, 2016, 381-387
  30. Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Diagonal in space of coordinate measuring machine verification using an optical-comb pulsed interferometer with a ball-lens target, Precision Engineering 43, 2016, 486-492

  31. Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target, Precision Engineering 41, 2015, 63-67
  32. S. Takahashi, Y. Horita, F. Kaji, Y. Yamaguchi, M. Michihata, K. Takamasu: Concept for laser-assisted nano removal beyond the diffraction limit using photocatalyst nanoparticles, CIRP Annals – Manufacturing Technology 64, 2015, 201-204
  33. 工藤良太, 高橋哲, 高増潔：変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究（第3報）－コヒーレント結像逐次再構成型超解像法の原理－，精密工学会誌 81 (6)，2015，562-569
  34. Meiyun Chen, Satoru Takahashi, Kiyoshi Takamasu: Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor, Precision Engineering 42, 2015, 276-282
  35. 工藤良太, 高橋哲, 高増潔：変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究（第4報）－コヒーレント結像逐次再構成型超解像法の実験的検証－，精密工学会誌 81 (7)，2015，684-691
  36. Hirokazu Matsumoto, Kiyoshi Takamasu: Automatic Recording Absolute Length-Measuring System with Fast Optical-Comb Fiber Interferometer, International Journal of Automation Technology 9 (5), 2015, 482-486
  37. 堀田陽亮，吉越久倫，松田恵介，道畑正岐，高増潔，高橋哲：レーザー集光点近傍における光触媒反応を利用した三次元微細構造創製に関する研究，日本機械学会論文集81 (832)，2015，15-309 1-13
  38. Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target, Precision Engineering 41, 2015, 63-67

  39. S. Takahashi, H. Yokozeki, D. Fujii, R. Kudo, K. Takamasu: A novel dark field in-process optical inspection method for micro-openings on mirrored surfaces beyond the diffraction limit using active phase control, CIRP Annals – Manufacturing Technology 63, 2014, 465-468
  40. Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu: Profile measurement of aspheric surfaces using scanning deflectometry and rotating autocollimator with wide measuring range, Measurement Science and Technology 25 (6), 2014, 064008 1-7
  41. Hisamichi Yoshigoe, Shotaro Kadoya, Satoru Takahashi, Kiyoshi Takamasu: Fabrication and Composition Control of Three-Dimensional Dielectric Metal Microstructure Using Photocatalyst Nanoparticles, International Journal of Automation Technology 8 (4), 2014, 523-529
  42. Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Lateral resolution improvement of laser-scanning imaging for nano defects detection, Advanced Optical Technologies 3 (4), 2014, 425-433
  43. Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Performance evaluation of a coordinate measuring machine’s axis using a high-frequency repetition mode of a mode-locked fiber laser, International Journal of Precision Engineering and Manufacturing 15 (8), 2014, 1507-1512
  44. Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Length Traceability using Optical Frequency Comb, Key Engineering Materials 625, 2014, 322-325
  45. Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: High-accuracy calibration of CMM using temporal-coherence fiber interferometer with fast-repetition comb laser, Key Engineering Materials 625, 2014, 66-72
  46. Dong Wei, Masato Aketagawa, Kiyoshi Takamasu, Hirokazu Matsumoto: Two-color absolute length measuring method based on pulse repetition interval lengths, Optical Engineering 53 (12), 2014, 122413 1-5
  47. Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu: Profile measurement of aspheric surfaces using scanning deflectometry and rotating autocollimator with wide measuring range, Measurement Science and Technology 25, 2014, 064008 1-7
  48. 高増潔，高橋哲（一部執筆）：石原直，加藤千幸，光石衛，渡邉聡（編）ナノ・マイクロスケール機械工学，東京大学出版，2014

  49. 大西徹，中西正一，高増潔：現場環境における三次元測定機の高度化に関する研究（第4報）－回転式プロービングシステムの評価－，精密工学会誌79 (4), 2013, 338-343
  50. S. Takahashi, Y. Ikeda, K. Takamasu: Study on nano thickness inspection for residual layer of nanoimprint lithography using near-field optical enhancement of metal tip, CIRP Annals – Manufacturing Technology 62, 2013, 527-530
  51. Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu: Random error analysis of profile measurement of large aspheric optical surface using scanning deflectometry with rotation stage, Precision Engineering 37, 2013, 599-605
  52. Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Spatial positioning measurements up to 150 m using temporal coherence of optical frequency comb, Precision Engineering 37, 2013, 635-639
  53. Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: A study of the possibility of using an adjacent pulse repetition interval length as a scale using a Helium-Neon interferometer, Precision Engineering 37, 2013, 694-698
  54. D. Wei, K. Takamasu, H. Matsumoto: Synthetic adjacent pulse repetition interval length method to solve integer ambiguity problem: theoretical analysis, Journal of the European Optical Society-Rapid Publications, Vol. 8, 2013, 13016 1-6
  55. D. Wei, K. Takamasu, H. Matsumoto: Temporal coherence shaping based on spectral-domain destructive interference of pulses with different self-phase modulations, Journal of the European Optical Society-Rapid Publications, Vol. 8, 2013, 13018 1-6

  56. R. Kudo, S. Usuki, S. Takahashi, K. Takamasu: Influence of standing wave phase error on super-resolution optical inspection for periodic microstructures, Meas. Sci. Technol. 23, 2012, 054007 1-13
  57. Dong Wei, Nan Wu, Kiyoshi Takamasu, Hirokazu Matsumoto: Remote Internal Diameter Measurement of Ring Gauge based on a Low-coherence Tandem Scheme, Key Engineering Materials Vol. 516, 2012, 533-538
  58. S. Takahashi, Y. Kajihara, K. Takamasu: Submicrometer thickness layer fabrication for layer-by-layer microstereolithography using evanescent light, CIRP Annals – Manufacturing Technology 61, 2012, 219-222
  59. Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, S. Takahashi, K. Takamasu: Height measurement of single nanoparticles based on evanescent field modulation, International Journal of Nanomanufacturing, Vol. 8, Nos. 5/6, 2012, 419-430
  60. Agustinus Winarno, Satoru Takahashi, Akiko Hirai, Kiyoshi Takamasu, Hirokazu Matsumoto: Absolute measurement of gauge block without wringing using tandem low-coherence interferometry, Meas. Sci. Technol. 23, 2012, 125001 1-8
  61. 工藤良太，高橋哲，高増潔：半導体ベアウエハ表面ナノ欠陥の超解像光学式計測に関する研究，砥粒加工学会誌 Vol.56 No.10, 2012, 709-710
  62. Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu: Fundamental study on nanoremoval processing method for microplastic structures using photocatalyzed oxidation, Key Engineering Materials Vols. 523-524, 2012, 610-614
  63. Kenta Matsui, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: New Non-contact Measurement of Small Inside-diameter Using Tandem Low-coherence Interferometer and Optical Fiber Devices, Key Engineering Materials Vols. 523-524, 2012, 871-876
  64. Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Development of a non-contact precision measurement technique using optical frequency combs, Key Engineering Materials Vols. 523-524, 2012, 877-882
  65. Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu: Sub-Nanometer Line Width and Line Profile Measurement Using STEM Images with Metal Coating, Key Engineering Materials Vols. 523-524, 2012, 957-960
  66. 高増潔（一部執筆）：震災後の工学は何をめざすのか　第7章　工学の新しい潮流，東京大学大学院工学系研究科編，2012
  67. Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Space position measurement using long-path heterodyne interferometer with optical frequency comb, Optics Express Vol. 20, No. 2, 2012, 2725-2732
  68. Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices: Uncertainty propagation analysis and experiments, Precision Engineering Vol. 36, No. 1, 2012, 91-96
  69. Hirokazu Matsumoto, Xiaonan Wang, Kiyoshi Takamasu, Tomohiro Aoto: Absolute Measurement of Baselines up to 403 m Using Heterodyne Temporal Coherence Interferometer with Optical Frequency Comb, Applied Physics Express, 5, 046601, 2012, 1-3
  70. Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: A new method for high-accuracy gauge block measurement using 2 GHz repetition mode of a mode-locked fiber laser, Measurement Science and Technology, 23, 054003, 2012, 1-6

  71. Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage, Precision Engineering Vol. 35, No. 2, 2011, 424-430
  72. S. Takahashi, R. Kudo, S. Usuki, K. Takamasu: Super resolution optical measurements of nanodefects on Si wafer surface using infrared standing evanescent wave, CIRP Annals – Manufacturing Technology Vol. 60, 2011, 523-526
  73. Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy, Precision Engineering Vol. 35, No. 3, 2011, 686-692
  74. 小谷 潔, 飯田 文明, 小川 雄太郎, 高増 潔, 神保 泰彦：Windkessel modelを用いた姿勢の違いに起因する循環器動態変化の評価，電気学会論文誌C（電子・情報・システム部門誌），Vol. 131, No.1，2011，140-145
  75. Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Simulation-Based Analysis of Influence of Error on Super-Resolution Optical Inspection, Int. J. of Automation Technology Vol. 5, No. 2, 2011, 167-172
  76. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Theoretical Analysis of Length Measurement Using Interference of Multiple Pulse Trains of a Femtosecond Optical Frequency Comb, Japanese Journal of Applied Physics 50(2), 2011, 022701-1-5

  77. 大西徹，高瀬省徳，高増潔：現場環境における三次元測定機の高度化に関する研究（第3報）－低熱膨張ブロックゲージを用いた温度補正の評価－，精密工学会誌 76(5)，2010， 541-545
  78. Kiyoshi Takamasu, Satoru Takahashi, Xin Chen: Uncertainty Estimation in Intelligent Coordinate and Profile Measurement, Key Engineering Materials, Vols. 447-448, 2010, 564-568
  79. Ping Yang, Shusaku Shibata, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM, Key Engineering Materials, Vols. 447-448, 2010, 590-594
  80. Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Optical Devices – Error Analysis and Pre-experiment -, Key Engineering Materials, Vols. 447-448, 2010, 604-608
  81. S. Takahashi, K. Watanabe, K. Takamasu: A novel resist surface profilometer for next-generation photolithography using mechano-optical arrayed probe system, CIRP Annals – Manufacturing Technology, 59, 2010, 521-524
  82. Keisuke Matsuda, Satoru Takahashi1, Kiyoshi Takamasu: Development of In-process Visualization System for Laser-assisted Three-dimensional Microfabrication using Photocatalyst Nanoparticles, International Journal of Precision Engineering and Manufacturing, Vol. 11, No. 6, 2010, 811-815
  83. S. Usuki, H. Nishioka S. Takahashi, K. Takamasu: Experimental verification of super-resolution optical inspection for semiconductor defect by using standing wave illumination shift, International Journal of Advanced Manufacturing Technology 46 (9-12), 2010 863-865
  84. Shin Usuki, Hiroaki Nishioka, Satoru Takahashi, Kiyoshi Takamasu: Experimental verification of super-resolution optical inspection for semiconductor defects by using standing wave illumination shift, International Journal of Advanced Manufacturing Technology 46, 2010, 863-875

  85. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Analysis of the temporal coherence function of a femtosecond optical frequency comb, Optics Express 17 (9), 2009, 7011-7018
  86. Wei Gao, Kiyoshi Takamasu, Yasuhiro Takaya, Satoru Takahashi: Guest Editors of Special Issue: Advances in Intelligent Nano-Measurement Technology, International Journal of Surface Science and Engineering 3 (3), 2009, 157-159
  87. Satoru Takahashi, Shuichi Minamiguchi, Toshiyuki Nakao, Shin Usuki, Kiyoshi Takamasu: Study on residual resist layer thickness measurement for Nanoimprint Lithography based on near-field optics, International Journal of Surface Science and Engineering 3 (3), 2009, 178-194
  88. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Simultaneous Observation of High Temporal Coherence between Two Pairs of Pulse Trains Using a Femtosecond-Optical-Frequency-Comb-Based Interferometer, Japanese Journal of Applied Physics 48, 2009, 070211 1-3
  89. Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Femtosecond optical frequency comb-based tandem interferometer, Journal of the European Optical Society 4, 2009, 09042 1-4
  90. D. Wei, S. Takahashi, K. Takamasu, H. Matsumoto: Experimental observation of pulse trains’ destructive interference with a femtosecond optical frequency-comb-based interferometer, Optics Letters 34 (18), 2009, 2775-2777
  91. Masao Sugi, Ippei Matsumura, Yusuke Tamura, Makoto Nikaido, Jun Ota, Tamio Arai, Kiyoshi Kotani, Kiyoshi Takamasu, Hiromasa Suzuki, Akio Yamamoto, Yoichi Sato, Seiichi Shin, Fumihiko Kimura: Quantitative Evaluation of Automatic Parts Delivery in “Attentive Workbench” Supporting Workers in Cell Production, Journal of Robotics and Mechatronics, Vol.21 No.1, 2009, 135-145
  92. Shujie Liu, Kentaro Watanabe, Xin Chen, Satoru Takahashi, Kiyoshi Takamasu: Profile measurement of a wide-area resist surface using a multi-ball cantilever system, Precision Engineering 33, 2009, 50-55

  93. S. Liu, K. Watanabe, S. Takahashi, K. Takamasu: Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System, Key Engineering Materials Vols. 381-382, 2008, 407-410
  94. X. Chen, K. Takamasu: Study on Scanning Squareness Measurement Method and Uncertainty Estimation, Key Engineering Materials Vols. 381-382, 2008, 569-572
  95. M. Nara, M. Abbe, K. Takamasu: Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data, Key Engineering Materials Vols. 381-382, 2008, 587-590
  96. 臼杵深，西岡宏晃，高橋哲，高増潔：変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究（第1報）－解像特性の理論的検討－，精密工学会誌，74 (5)，2008，498-503
  97. 臼杵深，西岡宏晃，高橋哲，高増潔：変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究（第2報）－定在波照明シフト実験による解像原理の実験的検証－，精密工学会誌，74 (6)，2008，581-586
  98. Yusuke Kajihara, Toru Takeuchi, Satoru Takahashi, Kiyoshi Takamasu: Development of an In-process Confocal Positioning System for Nanostereolithography Using Evanescent Light, International Journal of Precision Engineering and Manufacturing, 9 (3), 51-54, 2008
  99. K. Takamasu, S. Takahashi, M. Abbe, R. Furutani: Uncertainty estimation for coordinate metrology with effects of calibration and form deviation in strategy of measurement, Meas. Sci. Technol. 19 (8), 2008, 084001
  100. S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu: Theoretical and numerical analysis of lateral resolution improvement characteristics for fluorescence microscopy using standing evanescent light with image retrieval, Meas. Sci. Technol., 19 (8), 2008, 084006
  101. 高増潔：5章5節　計測評価システム　 5.1 形状測定機，吉本成香編　実用　精密位置決め技術辞典，専業技術サービスセンター，2008，296-302
  102. Kiyoshi Kotani, Kiyoshi Takamasu, Yasuhiko Jimbo, Yoshiharu Yamamoto: Postural-induced phase shift of respiratory sinus arrhythmia and blood pressure variations: insight from respiratory-phase domain analysis, American Journal of Physiology-Heart and Circulatory Physiology 294:1481-1489, 2008, 1481-1489
  103. 高増潔（Supervisor）：Academic Groove, The University of Tokyo, 東京大学, 2008
  104. Y. Kajihara, Y. Inazuki, T. Takeuchi, S. Takahashi, K. Takamasu: Evanescent light photopolymerization and measurement of cure depth in nanostereolithography, Applied Physics Letters 92, 093120, 2008, 093120 1-3

  105. K. Kotani, M. Tachibana, K. Takamasu: Respiratory-phase Domain Analysis of Heart Rate Variability can Accurately Estimate Cardiac Vagal Activity during a Mental Arithmetic Task, Methods of Information in Medicine 46 3: 376-385, 2007, 376-385
  106. 陳欣，小谷潔，高増潔：空間周波数領域2点法に関する研究（第1報）－2組の2点法を組合わせる場合の系統誤差の補正－，精密工学会誌，73（6）, 2007, 653-658
  107. 大西徹，高瀬省徳，高増潔：現場環境における三次元測定機の高度化に関する研究（第2報）－直角誤差補正－，精密工学会誌，73（7）, 2007, 818-822
  108. 梶原優介，稲月友一，高橋哲，高増潔：エバネッセント光を利用したナノ光造形法に関する研究（第2報）－定在エバネッセント光を利用した微細周期構造創製－，精密工学会誌，73（8）, 2007, 934-939
  109. 小谷潔，飯田文明，赤川智洋，斉藤毅，神保泰彦，河口洋一郎，高増潔：体動の影響下におけるリアルタイム副交感神経活動推定法の開発とインタラクティブCGの生成，電気学会論文誌C，127（10）, 2007, 1762-1769 
  110. 高増潔：5.2.3　形状, 日本機械学会編：機械工学便覧デザイン編β5　計測工学, 2007, 66-71
  111. 大西徹，高瀬省徳，高増潔：現場環境における三次元測定機の高度化に関する研究（第1報）－温度ドリフトの評価および補正，精密工学会誌，73（2），2007，270-274
  112. K. Kotani, M. Tachibana, K. Takamasu: Investigation of the Influence of Swallowing, Coughing and Vocalization on Heart Rate Variability with Respiratory-phase Domain Analysis, Methods of Information in Medicine, 46 (2), 2007, 179-185

  113. 梶原優介，稲月友一，高橋哲，高増潔：エバネッセント光を利用したナノ光造形法に関する研究（第1報），精密工学会誌，72（11），2006，1391-1396
  114. Shujie Liu, Shuichi Nagasawa, Satoru Takahashi, Kiyoshi Takamasu: Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface, Journal of Robotics and Mechatronics, Vol. 18, No. 6, 2006, 698-704
  115. 陳欣，高増潔，小谷潔，石田敏博：平面リニアモータの精度校正に関する研究（第1報）－反射ミラーの形状計測－，精密工学会誌，72（12），2006，1542-1546
  116. 高増潔：10.2　加工部品の測定，日本機械学会編：機械工学便覧デザイン編β3　加工学・加工機器，2006，222-229
  117. 高増潔：7．加工評価　7.1　評価項目とその定義，竹内芳美，青山藤詞郎，新野秀憲，光石衛，国枝正典，今村正人，三井公之（編集），機械加工ハンドブック，朝倉書店，2006，437-450
  118. Ichiko Misumi, Satoshi Gonda, Tomizo Kurosawa, Yasushi Azuma, Toshiyuki Fujimoto, Isao Kojima, Toshihisa Sakurai, Tadahiro Ohmi, Kiyoshi Takamasu: Reliability of parameters of associated base straight line in step height samples: Uncertainty evaluation in step height measurements using nanometrological AFM, Precision Engineering, 30, 2006, 13-22
  119. 臼杵深，侯冰，清澤圭太朗，江並和宏，平木雅彦，高橋哲，高増潔，大園成夫：リングビームを用いた三次元変位測定法（第2報）－リングイメージの楕円近似による非線形性の改善－，精密工学会誌，72（1），2006，132-136
  120. Masao Sugi, Yusuke Tamura, Makoto Nikaido, Jun Ota, Tamio Arai, Kiyoshi Takamasu, Kiyoshi Kotani, Akio Yamamoto, Hiromasa Suzuki, Yoichi Sato, Fumihiko Kimura, Seiichi Shin: Human Supporting Production Cell “Attentive Workbench”, Intelligent Autonomous Systems 9 (IAS-9), edited by T. Arai et al., IOS Press, 2006, 740-747
  121. Gheorghe Olea, Kiyoshi Takamasu, Benoit Raucent: Precision Multi-Degrees-Of-Freedom Positioning Systems – Modular Design for Assembly Applications -, Precision Assembly Technologies for Mini and Micro Products, edited by Svetan Ratchev (IFIP (International Federation for Information Processing) series Vol. 198), 2006

  122. 小谷潔，斉藤毅，立花誠，高増潔：リアルタイム呼吸性洞性不整脈抽出法を用いた作業負荷の制御，生体医工学，43（2），2005，252-260
  123. 高増潔，佐藤理，下嶋賢，古谷涼秋：座標測定機のアーティファクト校正（第3報）－校正後の測定の不確かさの推定－，精密工学会誌，71（7），2005，890-894
  124. Chanin Sinlapeecheewa, Kiyoshi Takamasu: 3D profile measurement using color multi-line stripe pattern with one shot scanning, Integrated Computer-Aided Engineering, 12 (4), 2005, 333-341
  125. S. Usuki, K. Enami, M. Hiraki, S. Takahashi, K. Takamasu: Theoretical Analysis and Basic Experiments for the 3D Displacement Measurement Using Ring-Shaped Laser Beam, Key Engineering Materials Vols. 295-296, 2005, 295-300
  126. X. Chen, K. Takamasu, M. Nikaidou: Evaluation of Thrust Force and Positioning Accuracy of a New Linear Motor, Key Engineering Materials Vols. 295-296, 2005, 613-618
  127. Kiyoshi Kotani, Zbigniew R. Struzik, Kiyoshi Takamasu, H. Eugene Stanley, Yoshiharu Yamamoto: Model for complex heart rate dynamics in health and diseases, Physical Review E, Vol. 72, 041904, 2005, 1-8
  128. 高増潔，阿部誠，古谷涼秋，大園成夫：形体計測における不確かさの見積り（第3報）－区分多項式による直線形体の形状偏差モデル－，精密工学会誌，71（11），2005，1454-1458

  129. 高増潔（一部執筆），小谷潔（東京大学21世紀COE実世界情報プロジェクト，佐藤知正編著）：人と共存するコンピュータ・ロボット学（実世界情報システム），オーム社，2004，177-195
  130. 佐藤理，高増潔，無類井格，Gheorghe Olea：パラレルメカニズムを用いたマイクロフライス盤の開発（第1報，設計パラメータの決定と試作機の製作），設計工学，39（4）， 2004，175-181
  131. 高増潔，佐藤理，Chanin Sinlapeecheewa，下嶋賢，古谷涼秋：座標測定機のアーティファクト校正（第2報）－冗長座標測定機の自己校正－，精密工学会誌，70（5），2004，711-715
  132. O. Sato, K. Shimojima, R. Furutani, K. Takamasu: Artifact calibration of parallel mechanism, kinematic calibration with a priori knowledge, Measurement Science and Technology, 15(6), 2004, 1158-1165
  133. 小谷潔，古川健太，高増潔：嚥下の心拍変動に与える影響の呼吸位相領域における解析，生体医工学，42（2），2004，61-65
  134. 佐藤理，下嶋賢，古谷涼秋，高増潔：パラレルメカニズムのアーティファクト校正（第１報）－緩い束縛条件を用いた運動学パラメータの校正－，精密工学会誌，70（1），2004，96-100
  135. 佐藤理，Gheorghe Olea，平木雅彦，高増潔：パラレルメカニズムを用いた三次元測定機の校正－複数のリンクセットを用いた校正－，精密工学会誌，70（2），2004，214-218

  136. I. Misumi, S. Gonda, T. Kurosawa, K. Takamasu: Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope, Meas. Sci. Technol. 14 (4), 2003, 463-471
  137. 高増潔，野坂健一郎，阿部誠，古谷涼秋，大園成夫：形体計測における不確かさの見積り（第2報）－円形体の計測における形状偏差の寄与－，精密工学会誌，69（5），2003，693-697
  138. M. Abbe, K. Takamasu, S. Ozono: Reliability on calibration of CMM, Measurement 33 (4), 2003, 359-368
  139. 郭志徹，高増潔，山本明弘，和田智之，洲之内啓，加瀬究，田代英夫：波長走査干渉計における信号処理，精密工学会誌，69（6），2003，831-835
  140. 下嶋賢，古谷涼秋，大園成夫，高増潔，平木雅彦，荒木健司：3次元測定機の不確かさ推定に関する研究（第1報）－多関節型3次元測定機の機構パラメータの算出と不確かさ推定－，精密工学会誌，69（6），2003，841-845
  141. 高増潔，古谷涼秋，下嶋賢，佐藤理：座標測定機のアーティファクト校正（第1報）－運動学パラメータの校正－，精密工学会誌，69（6），2003，851-855
  142. 小谷潔，古川健太，高増潔：呼吸情報に着目した高精度な呼吸性洞性不整脈の抽出法，生体医工学，41（3），2003，197-204
  143. 江並和宏，臼杵深，平木雅彦，高橋哲，高増潔，大園成夫：リングビームを用いた三次元変位測定法（第1報）－理論解析と基礎実験－，精密工学会誌，69（12），2003，1764-1768 

  144. K. Kotani, K. Takamasu, Y. Ashkenazy, H. Stanley, Y. Yamamoto: Model for Cardiorespiratory Synchronization in Humans, Physical Review E, Vol. 65, 051923, 2002, 1-9
  145. M. Hiraki, K. Enami, K. Takamasu, S. Ozono: Omni-Directional Obstracle Detection, European Journal of Automation, Vol. 36, 9, 2002, 1221-1234
  146. 川合知二，高増潔（一部執筆）他：図解　ナノテク活用技術のすべて：工業調査会，2002，56-58
  147. 郭志徹，高増潔，山本明弘，和田智之，須之内啓，加瀬究，田代英夫：波長走査干渉計における波長掃引の校正，精密工学会誌，68（3），2002，392-396

  148. 阿部誠，高増潔，大園成夫：座標比較によるCMM校正システムの開発（第1報）－試作システムの構成とその基本的な評価－，精密工学会誌，67（4），2001，638-643
  149. 阿部誠，高増潔，大園成夫：座標比較によるCMM校正システムの開発（第2報）－校正の信頼性の統計的な評価－，精密工学会誌，67（6），2001，976-981
  150. M. Fujiwara, A. Yamaguchi, K. Takamasu, S. Ozono: Evaluation of Stages of Nano-CMM, Initiatives of precision engineering at the beginning of a millennium (edited by Ichiro Inasaki), Kluwer Academic Publishers (Netherlands), 2001, 634-638
  151. O. Sato, M. Hiraki, K. Takamasu, S. Ozono: Calibration of 2-DOF Parallel Mechanism, Initiatives of precision engineering at the beginning of a millennium (edited by Ichiro Inasaki), Kluwer Academic Publishers (Netherlands), 2001, 734-738
  152. 高増潔，阿部誠，古谷涼秋，大園成夫：形体計測における不確かさの見積り（第1報）－校正作業で生じる系統誤差の寄与－，精密工学会誌，67（1），2001，91-95

  153. 郭志徹，高増潔，平木雅彦，古谷涼秋，大園成夫：吸気型ボールプローブの開発（第2報）－空気トリガセンサ式プローブの評価実験－，精密工学会誌，66（4），2000，612-616
  154. 阿部誠，高増潔，大園成夫：空間座標の比較測定によるCMMの校正（第2報）－パラメトリックエラー推定値の信頼性－，精密工学会誌，66（4），2000，578-582
  155. J.Lenarcic, G.Olea, K.Takamasu（一部執筆）et al: Advances in Robot Kinematics, Kluwer Academic Publishers, 2000, 403-410
  156. 石井明，高増潔（一部執筆）他：画像処理応用システム，東京電機大学出版局，2000，182-190
  157. 阿部誠，高増潔，大園成夫，沢辺雅二：空間座標の比較測定によるCMMの構成（第1報）－パラメトリックエラーモデルの構成とそのシミュレーション－，精密工学会誌，66（3），2000，483-488．

  158. Kiyoshi Takamasu, Kuo Chih-Che, Akihiro Suzuki, Masahiko Hiraki, Ryoshu Furutani, Shigeo Ozono: Development of a Pneumatic Ball Probe (1st Report) – Basic Construction -, International Journal of Japan Society of Precision Engineering, 33 (3), 1999, 233-238
  159. Sonko Osawa, Ryoshu Furutani, Kiyoshi Takamasu, Shigeo Ozono, Hidemitsu Asano: 3-D shape measurement by self-referenced pattern projection method, Measurement, 26 (3), 1999, 157-166
  160. Kiyoshi Takamasu, Ryoshu Furutani, Shigeo Ozono: Basic Concept of Feature-Based Metrology, Measurement, 26 (3), 1999, 151-156

  161. 高増潔，古谷涼秋，大園成夫：最小領域法の座標計測における統計的評価，精密工学会誌，64（4），1998，557-561
  162. 高増潔，郭志徹，鈴木昭洋，平木雅彦，古谷涼秋，大園成夫：吸気型ボールプローブの開発（第1報）－基本的構成－，精密工学会誌，64（8），1998，1153-1157
  163. 大澤尊光，浅野秀光，古谷涼秋，高増潔，大園成夫：多値パターン投影による三次元形状測定（第3報）－自己参照パターン投影法－，精密工学会誌，64（2），1998，236-240
  164. 高増潔，郭必偉，古谷涼秋，大園成夫：形体計測の基本概念，精密工学会誌，64（1），1998，94-98

  165. 高増潔，古谷涼秋，大園成夫：座標計測における形体パラメータの信頼性，精密工学会誌，63（11），1997，1594-1598
  166. 高増潔，古谷涼秋，大園成夫：最小二乗法による円筒形体の計算における初期値の決定，設計工学，32（11），1997，436-441
  167. R. Furutani, H. Asano, K. Takamasu, S. Ozono: 3D Profile measurement using a multi-gray scale compared with reference projections, Measurement, 20 (2), 1997, 129-134
  168. Yuki Cheng, Kiyoshi Takamasu, Shigeo Ozono: Sensing Behavior and Evolving Model, J. Graduate School and Faculty of Engineering, The University of Tokyo (B), XLIC (2), 1997, 77-87
  169. 大園成夫，下河辺明，高増潔（一部執筆）他：精密測定機器の選び方・使い方，日本規格協会，1997，1-367

  170. Kiyoshi Takamasu, Iturou Fukuda, Ryoshu Furutani, Junhee Hong, Shigeo Ozono: Data Processing Method for Geometrical Forms with Form Deviations in Coordinate Metrology, Computer-Aided Tolerancing, Chapman & Hall, 1996, 273-282.
  171. 高増潔，福田逸郎，古谷涼秋，洪俊憙，大園成夫：座標計測における幾何偏差を含んだ形体間演算，精密工学会誌，62（7），1996， 964-968
  172. 浅野秀光，大澤尊光，古谷涼秋，高増潔，大園成夫，上川哲生：多値パターン投影による3次元形状測定（第2報）－空間符号化の信頼性向上－，精密工学会誌，62（6），1996，830-834

  173. Shigeo Ozono, Kiyoshi Takamasu: Data Processing and Calibration of Coordinate Measuring Machine, International Journal of Japan Society of Precision Engineering, 29(2), 1995, 105-108
  174. 大澤尊光，古谷涼秋，川上和彦，高増潔，大園成夫，上川哲生：多値パターン投影による3次元形状測定，精密工学会誌，61（8），1995，101-110
  175. 高増潔：形状測定におけるソフトウェアの問題点，精密工学会誌，61（8），1995，1049-1055
  176. Shigeo Ozono, Kiyoshi Takamasu: Data Processing and Calibration of Coordinate Measuring Machine, International Journal of Japan Society of Precision Engineering, 29(2), 1995, 105-108
  177. 洪俊憙，川上和彦，古谷涼秋，高増潔，大園成夫：測定データから抽出した幾何パラメータによる加工工程の管理手法，精密工学会誌，61（12），1995，1710-1715

  178. Kiyoshi Takamasu: Developments of Coordinate Measuring Machine in Production, J. of Qualitech and Automation, 18(5), 1994, 38-42

  179. Kiyoshi Takamasu: Measurement System for Multiple Degree of Freedom Moving Robot, J. Robotics Mechatronics, 5(5), 1993, 453-456

  180. 高増潔，加藤純一：オプトメカトロニクスにおけるフレキシブル光計測，精密工学会誌，58（3），1992，422-425

  181. 高増潔：デジタル光学素子を用いた形状測定方法の研究（第１報）－反射物体の形状測定－，精密工学会誌，56（6），1990，1117-112

  182. 古谷涼秋，斎藤隆行，加藤純一，大園成夫，高増潔：3次元形状の評価法，精密工学会誌，54（5），1988，890-895

  183. 志沢雅彦，加藤純一，大園成夫，高増潔：ディジタルPLLを用いたしま画像からの実時間形状復元処理，精密工学会誌，52（2），1987，334-339
  184. 高増潔，加藤純一，大園成夫：移動ロボット用環境センサの研究，日本ロボット学会誌，5（3），1987，199-202

  185. Kiyoshi Takamasu, Shigeo Ozono: Graphical Analysis of Space Coordinate Data to Determine the Spatial Position and Form of a Three-Dimensional Object, Precision Machinery and Mechaoptoelectronics, 12, 1986, 150-155
  186. 高増潔，大園成夫：図面空間の認識 －測定のための図面処理の手法－，精密工学会誌，52（2），1986，300-305
  187. 若林秀樹，加藤純一，高増潔，大園成夫：ホログラフィによる微粒子計測の自動化に関する基礎研究，精密工学会誌，52（7），1986，1187-119

  188. 高増潔，大園成夫：最小二乗法によるデ－タム平面の決定方法，精密機械，51（3），1985，563-568
  189. Junichi Kato, Kiyoshi Takamasu, Shigeo Ozono: Investigation on Material Expulsion Mechanism in Laser Drilling Using Modelled Work Piece, Bull. Japan Society of Precision Engineering, 19(2), 1985, 133-134

  190. 薛軍，大園成夫，高増潔：三次元座標測定機の案内精度の測定試験と精度検討，精密機械，50（3），1984，556-560